JPH0440459U - - Google Patents
Info
- Publication number
- JPH0440459U JPH0440459U JP8250890U JP8250890U JPH0440459U JP H0440459 U JPH0440459 U JP H0440459U JP 8250890 U JP8250890 U JP 8250890U JP 8250890 U JP8250890 U JP 8250890U JP H0440459 U JPH0440459 U JP H0440459U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- arc chamber
- slit
- arc
- chamber body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002019 doping agent Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8250890U JPH0440459U (en]) | 1990-08-01 | 1990-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8250890U JPH0440459U (en]) | 1990-08-01 | 1990-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0440459U true JPH0440459U (en]) | 1992-04-06 |
Family
ID=31629388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8250890U Pending JPH0440459U (en]) | 1990-08-01 | 1990-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440459U (en]) |
-
1990
- 1990-08-01 JP JP8250890U patent/JPH0440459U/ja active Pending